Inventor

ULM MARKUS

DE22 patents

⚠️ This page may combine multiple inventors who share the name “ULM MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULM MARKUS

BOSCH GMBH ROBERT

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Method of producing a device

Tri-axis accelerometer having a single proof mass and fully differential output signals

Energy harvesting device manufactured by print forming processes

Microelectromechanical devices and fabrication methods

Microelectromechanical systems encapsulation process with anti-stiction coating

Microelectromechanical systems encapsulation process

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Microelectromechanical systems encapsulation process

Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch

Coplanar waveguide switch

Component for impedance change in a coplanar waveguide and method for producing a component

CMOS integrated moving-gate transducer with silicon as a functional layer

Structural element having a coplanar line

CMOS integrated moving-gate transducer with silicon as a functional layer

Coplanar switch

Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component

Capacitive finger coupling element on a silicon support for coupling a strip line structure

PAN ZHIYU

Tri-axis accelerometer having a single proof mass and fully differential output signals

Tri-axis accelerometer having a single proof mass and fully differential output signals

ULM MARKUS

Sensor device

Method for controlling a device and a device for controlling the device