Inventor

PAPASOULIOTIS GEORGE

US7 patents

⚠️ This page may combine multiple inventors who share the name “PAPASOULIOTIS GEORGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US7586100B2Sep 8, 2009

Closed loop control and process optimization in plasma doping processes using a time of flight ion detector

VARIAN SEMICONDUCTOR EQUIPMENT35 citations89

US8858816B2Oct 14, 2014

Enhanced etch and deposition profile control using plasma sheath engineering

VARIAN SEMICONDUCTOR EQUIPMENT4 citations72

VEECO INSTR INC

2 patents

US9748113B2Aug 29, 2017

Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system

VEECO INSTR INC2 citations69

US9806183B2Oct 31, 2017

Stress control on thin silicon substrates

VEECO INSTR INC0 citations51

GODET LUDOVIC

1 patent

US8603591B2Dec 10, 2013

Enhanced etch and deposition profile control using plasma sheath engineering

GODET LUDOVIC8 citations83

MAYNARD HELEN

1 patent

US8431495B2Apr 30, 2013

Stencil mask profile

MAYNARD HELEN0 citations40

PAPASOULIOTIS GEORGE

1 patent

US8728587B2May 20, 2014

Closed loop process control of plasma processed materials

PAPASOULIOTIS GEORGE0 citations38