Inventor
SIGAL ILIYA
US4 patents
Patents
4 patentsUS11270906B2Mar 8, 2022
Burls with altered surface topography for holding an object in lithography applications
ASML HOLDING NV1 citations56
US12560872B2Feb 24, 2026
Vacuum sheet bond fixturing and flexible burl applications for substrate tables
ASML HOLDING NV0 citations54
US11988971B2May 21, 2024
Lithographic apparatus, substrate table, and method
ASML HOLDING NV0 citations53
US11520241B2Dec 6, 2022
Lithography supports with defined burltop topography
ASML HOLDING NV0 citations53