Inventor
MATSUNO TADASHI
JP15 patents
Patents
15 patentsUS6291891B1Sep 18, 2001
Semiconductor device manufacturing method and semiconductor device
TOSHIBA KK69 citations96
US6163067ADec 19, 2000
Semiconductor apparatus having wiring groove and contact hole in self-alignment manner
TOSHIBA KK49 citations96
US6046502AApr 4, 2000
Semiconductor device with improved adhesion between titanium-based metal layer and insulation film
TOSHIBA KK52 citations96
US5874779AFeb 23, 1999
Semiconductor device with improved adhesion between titanium-based metal wiring layer and insulation film
TOSHIBA KK58 citations96
US5753975AMay 19, 1998
Semiconductor device with improved adhesion between titanium-based metal wiring layer and insulation film
TOSHIBA KK44 citations96
US6051508AApr 18, 2000
Manufacturing method of semiconductor device
TOSHIBA KK81 citations94
US6368951B2Apr 9, 2002
Semiconductor device manufacturing method and semiconductor device
TOSHIBA KK16 citations92
US6127256AOct 3, 2000
Semiconductor device and method of manufacturing the same
TOSHIBA KK18 citations92
US5976972ANov 2, 1999
Method of making semiconductor apparatus having wiring groove and contact hole formed in a self-alignment manner
TOSHIBA KK38 citations92
US5966634AOct 12, 1999
Method of manufacturing semiconductor device having multi-layer wiring structure with diffusion preventing film
TOSHIBA KK41 citations92
US5850102ADec 15, 1998
Semiconductor device having a second insulating layer which includes carbon or fluorine at a density lower than a first insulating layer
TOSHIBA KK32 citations92
US6004887ADec 21, 1999
Semiconductor device with improved adhesion between titanium-based metal wiring layer and insulation film
TOSHIBA KK18 citations84
US5759915AJun 2, 1998
Method of forming semiconductor device having an improved buried electrode formed by selective CVD
TOSHIBA KK11 citations74
US5106782AApr 21, 1992
Method of manufacturing a semiconductor device
TOSHIBA KK9 citations74
US5948698ASep 7, 1999
Manufacturing method of semiconductor device using chemical mechanical polishing
TOSHIBA KK9 citations73