Inventor

FUNK MERRITT L

US3 patents

⚠️ This page may combine multiple inventors who share the name “FUNK MERRITT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO DEVICES INC

1 patent

US6148239ANov 14, 2000

Process control system using feed forward control threads based on material groups

ADVANCED MICRO DEVICES INC128 citations90

TOKYO ELECTRON LTD

1 patent

US7289864B2Oct 30, 2007

Feature dimension deviation correction system, method and program product

TOKYO ELECTRON LTD8 citations70

IBM

1 patent

US7502660B2Mar 10, 2009

Feature dimension deviation correction system, method and program product

IBM0 citations49