Inventor

EURLINGS MARKUS F A

NL2 patents

Patents

2 patents

US6826451B2Nov 30, 2004

Lithography tool having a vacuum reticle library coupled to a vacuum chamber

ASML HOLDING NV67 citations92

US7057711B2Jun 6, 2006

Lithography tool having a vacuum reticle library coupled to a vacuum chamber

ASML HOLDING NV12 citations80