Inventor
ARMOUR ERIC
US4 patents
Patents
4 patentsUS10134617B2Nov 20, 2018
Wafer carrier having thermal cover for chemical vapor deposition systems
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US9748113B2Aug 29, 2017
Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system
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US10570510B2Feb 25, 2020
Periphery purge shutter and flow control systems and methods
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US10099185B2Oct 16, 2018
Enhanced enclosures for acoustical gas concentration sensing and flow control
VEECO INSTR INC1 citations37