Inventor
WANG ZHEFU
US6 patents
⚠️ This page may combine multiple inventors who share the name “WANG ZHEFU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS9754846B2Sep 5, 2017
Inductive monitoring of conductive trench depth
APPLIED MATERIALS INC5 citations83
US10103073B2Oct 16, 2018
Inductive monitoring of conductive trench depth
APPLIED MATERIALS INC3 citations72
US9911664B2Mar 6, 2018
Substrate features for inductive monitoring of conductive trench depth
APPLIED MATERIALS INC3 citations72
US10741459B2Aug 11, 2020
Inductive monitoring of conductive loops
APPLIED MATERIALS INC0 citations51
US10199281B2Feb 5, 2019
Substrate features for inductive monitoring of conductive trench depth
APPLIED MATERIALS INC0 citations51