Inventor

MIYOSHI AYUMU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “MIYOSHI AYUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAMANAKA KAZUTO

2 patents

US8601978B2Dec 10, 2013

Substrate processing apparatus, and magnetic recording medium manufacturing method

YAMANAKA KAZUTO0 citations35

US8281740B2Oct 9, 2012

Substrate processing apparatus, and magnetic recording medium manufacturing method

YAMANAKA KAZUTO0 citations35

ANELVA CORP

1 patent

US6641703B2Nov 4, 2003

Magnetic multi-layer film manufacturing apparatus

ANELVA CORP38 citations91

CANON ANELVA CORP

1 patent

US7850827B2Dec 14, 2010

Double-layer shutter control method of multi-sputtering system

CANON ANELVA CORP8 citations82

NOMURA SHUJI

1 patent

US8900426B2Dec 2, 2014

Double-layer shutter sputtering apparatus

NOMURA SHUJI4 citations66

HIRAYANAGI HIROHISA

1 patent

US8536539B2Sep 17, 2013

Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator

HIRAYANAGI HIROHISA2 citations49