Inventor

RILLE EDUARD

AT3 patents

Patents

3 patents

US4622121ANov 11, 1986

Apparatus for coating materials by cathode sputtering

BALZERS HOCHVAKUUM94 citations93

US4668373AMay 26, 1987

Target plate for cathode sputtering

BALZERS HOCHVAKUUM21 citations76

US4747927AMay 31, 1988

Target plate for cathode disintegration

BALZERS HOCHVAKUUM9 citations65