Inventor
MATSUI SHIGERU
JP90 patents
⚠️ This page may combine multiple inventors who share the name “MATSUI SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
23 patentsUS6157444ADec 5, 2000
Defect inspection apparatus for silicon wafer
HITACHI LTD89 citations98
US6384909B2May 7, 2002
Defect inspection method and apparatus for silicon wafer
HITACHI LTD47 citations96
US6256092B1Jul 3, 2001
Defect inspection apparatus for silicon wafer
HITACHI LTD41 citations96
US4727325AFeb 23, 1988
NMR imaging method
HITACHI LTD59 citations96
US6792359B2Sep 14, 2004
Method for inspecting defect and system therefor
HITACHI LTD29 citations92
US6191849B1Feb 20, 2001
Wafer inspecting apparatus
HITACHI LTD31 citations92
US6160615ADec 12, 2000
Surface measurement apparatus for detecting crystal defects of wafer
HITACHI LTD35 citations92
US6108079AAug 22, 2000
Method for measuring crystal defect and equipment using the same
HITACHI LTD30 citations92
US4777443AOct 11, 1988
Inspection apparatus based on nuclear magnetic resonance
HITACHI LTD26 citations92
US6226079B1May 1, 2001
Defect assessing apparatus and method, and semiconductor manufacturing method
HITACHI LTD35 citations91
US6683683B2Jan 27, 2004
Defect inspection method and apparatus for silicon wafer
HITACHI LTD13 citations84
US7010447B2Mar 7, 2006
Method for inspecting defect and system therefor
HITACHI LTD6 citations74
US5253183AOct 12, 1993
Obtaining a spectrogram from a single scanning of interference fringes
HITACHI LTD19 citations74
US4797616AJan 10, 1989
High speed NMR spectroscopic imaging method
HITACHI LTD14 citations74
US4752735AJun 21, 1988
Method for measuring the time dependence of the field gradient in an NMR imaging device
HITACHI LTD10 citations74
US4733188AMar 22, 1988
NMR imaging method
HITACHI LTD17 citations74
US4732481AMar 22, 1988
Polarization interferometer
HITACHI LTD16 citations74
US4716369ADec 29, 1987
High speed imaging method with three-dimensional NMR
HITACHI LTD15 citations74
US4689568AAug 25, 1987
NMR chemical shift imaging method
HITACHI LTD12 citations74
US4683433AJul 28, 1987
Imaging method and apparatus using nuclear magnetic resonance
HITACHI LTD7 citations74
US4672318AJun 9, 1987
Method of measuring the static magnetic field distribution in an NMR inspection system
HITACHI LTD8 citations74
US5557404ASep 17, 1996
Spectrophotometer with a system for calibrating a monochromator
HITACHI LTD14 citations73
US4625170ANov 25, 1986
NMR imaging method and apparatus
HITACHI LTD10 citations73
HITACHI HIGH TECH CORP
17 patentsUS7761246B2Jul 20, 2010
Surface inspection method and surface inspection apparatus
HITACHI HIGH TECH CORP97 citations98
US7457455B2Nov 25, 2008
Pattern defect inspection method and apparatus
HITACHI HIGH TECH CORP22 citations93
US8035808B2Oct 11, 2011
Surface defect inspection method and apparatus
HITACHI HIGH TECH CORP14 citations92
US7710557B2May 4, 2010
Surface defect inspection method and apparatus
HITACHI HIGH TECH CORP24 citations92
US7773210B2Aug 10, 2010
Appearance inspection apparatus
HITACHI HIGH TECH CORP10 citations84
US7764367B2Jul 27, 2010
Surface inspection method and surface inspection apparatus
HITACHI HIGH TECH CORP10 citations84
US7602482B2Oct 13, 2009
Optical inspection method and optical inspection apparatus
HITACHI HIGH TECH CORP10 citations84
US7557911B2Jul 7, 2009
Appearance inspection apparatus
HITACHI HIGH TECH CORP10 citations84
US7535562B2May 19, 2009
Apparatus and method for defect inspection
HITACHI HIGH TECH CORP10 citations84
US7487049B2Feb 3, 2009
Surface inspection method and surface inspection apparatus
HITACHI HIGH TECH CORP12 citations84
US7719669B2May 18, 2010
Surface inspection method and surface inspection apparatus
HITACHI HIGH TECH CORP13 citations83
US9157866B2Oct 13, 2015
Light source device, surface inspecting apparatus using the device, and method for calibrating surface inspecting apparatus using the device
HITACHI HIGH TECH CORP5 citations82
US7671980B2Mar 2, 2010
Surface inspection method and surface inspection apparatus
HITACHI HIGH TECH CORP5 citations74
US7456948B2Nov 25, 2008
Method for detecting particles and defects and inspection equipment thereof
HITACHI HIGH TECH CORP4 citations73
US7133127B2Nov 7, 2006
Lighting optical machine and defect inspection system
HITACHI HIGH TECH CORP7 citations73
US9945993B2Apr 17, 2018
Curved grating, method for manufacturing the same, and optical device
HITACHI HIGH TECH CORP2 citations72
US9709714B2Jul 18, 2017
Curved face diffraction grating fabrication method, curved face diffraction grating cast, and curved face diffraction grating employing same
HITACHI HIGH TECH CORP2 citations71
MITSUBISHI ELECTRIC CORP
4 patentsUS6118742ASep 12, 2000
Disk-rotation control apparatus
MITSUBISHI ELECTRIC CORP25 citations92
US6421308B1Jul 16, 2002
State detecting device and optical disk device
MITSUBISHI ELECTRIC CORP17 citations83
US6331967B1Dec 18, 2001
Disk-rotation control apparatus
MITSUBISHI ELECTRIC CORP9 citations73
US6259662B1Jul 10, 2001
Disk rotation control device
MITSUBISHI ELECTRIC CORP11 citations73
SEIKO EPSON CORP
2 patentsNIPPON MUSICAL INSTRUMENTS MFG
2 patentsJIMBO ELECTRIC
1 patentOKA KENJI
1 patentShowing the top 50 of 90 patents by PatentIndex Score.