Inventor

HUFF MICHAEL A

US41 patents

⚠️ This page may combine multiple inventors who share the name “HUFF MICHAEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUFF MICHAEL A

CORP FOR NAT RES INITIATIVES

Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

MEMS-based variable capacitor

Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure

Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure

Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure

Method for fabricating and manufacturing micro—and nano-fabricated devices and systems securely

Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method

Method for etching deep, high-aspect ratio features into glass, fused silica, and quartz materials

Self-aligned dynamic pattern generator device and method of fabrication

Self-aligned dynamic pattern generator device and method of fabrication

Versatile communication system and method of implementation using heterogeneous integration

Fabrication of transducer structures

Method of fabricating small dimensioned lens elements and lens arrays using surface tension effects

CORPORATION FOR NATIONAL RES INITIATIVES

Piezoelectrically-actuated microvalve device and method of fabrication

Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride

Three-way microvalve device and method of fabrication

Low-cost, high-performance and highly customizable micro-scale pressure and force sensor

Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride

Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride

Three-way microvalve device and method of fabrication

Low-cost microfluidic devices and systems and method of manufacturing

Microsensors applied to athletes bodies in order to provide real-time feedback about sport-specific technique for sport performance improvements

Integrated microfluidic system and method of fabrication

Low-cost method of making a hard mask for high resolution and low dimensional variations for the fabrication and manufacturing of micro- and nano-devices and -systems

Packaging of microfluidic devices and microfluidic integrated systems and method of fabrication

Method and system for controlling the state of stress in deposited thin films

HUFF MICHAEL A

Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress states

Means for improved implementation of laser diodes and laser diode arrays

Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices

Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objects

Variable capacitor tuned using laser micromachining

Variable capacitor tuned using laser micromachining

System and method for precision fabrication of micro- and nano-devices and structures

Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systems

BOSCH GMBH ROBERT

Method of making a microvalve

Method of making a microvalve

MASSACHUSETTS INST TECHNOLOGY

Micromachined threshold pressure switch and method of manufacture

ORBITAL RES INC

Method and sensor for detecting strain using shape memory alloys

FLUSBERG ALLEN M

Fabrication of transducer structures