Inventor
LIM KYU-HONG
KR4 patents
Patents
4 patentsUS6528333B1Mar 4, 2003
Method of and device for detecting micro-scratches
SAMSUNG ELECTRONICS CO LTD28 citations91
US6449037B2Sep 10, 2002
Method of and device for detecting micro-scratches
SAMSUNG ELECTRONICS CO LTD19 citations91
US5926691AJul 20, 1999
Methods of fabricating borophosphosilicate glass (BPSG) films having impurity concentrations which remain stable over time, and for using such films testing of microelectronic devices
SAMSUNG ELECTRONICS CO LTD7 citations71
US7235411B2Jun 26, 2007
Method for aligning a wafer and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD3 citations59