Inventor

WESTHOFF RICHARD C

US5 patents

⚠️ This page may combine multiple inventors who share the name “WESTHOFF RICHARD C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAWRENCE SEMICONDUCTOR RESEARC

2 patents

US5906708AMay 25, 1999

Silicon-germanium-carbon compositions in selective etch processes

LAWRENCE SEMICONDUCTOR RESEARC172 citations97

US6064081AMay 16, 2000

Silicon-germanium-carbon compositions and processes thereof

LAWRENCE SEMICONDUCTOR RESEARC159 citations96

TOKYO ELECTRON LTD

2 patents

US6482477B1Nov 19, 2002

Method for pretreating dielectric layers to enhance the adhesion of CVD metal layers thereto

TOKYO ELECTRON LTD20 citations91

US6632737B1Oct 14, 2003

Method for enhancing the adhesion of a barrier layer to a dielectric

TOKYO ELECTRON LTD5 citations62

(unassigned)

1 patent

US5961877AOct 5, 1999

Wet chemical etchants

60 citations95