Inventor
WU CHIA-FANG
TW6 patents
⚠️ This page may combine multiple inventors who share the name “WU CHIA-FANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6872507B2Mar 29, 2005
Radiation correction method for electron beam lithography
TAIWAN SEMICONDUCTOR MFG30 citations91
US6420703B1Jul 16, 2002
Method for forming a critical dimension SEM calibration standard of improved definition and standard formed
TAIWAN SEMICONDUCTOR MFG14 citations81
US6151794ANov 28, 2000
Apparatus for heat treating an object
TAIWAN SEMICONDUCTOR MFG8 citations70