Inventor

TAGO TSUGUHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “TAGO TSUGUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUI ATSUSHI

1 patent

US9193904B2Nov 24, 2015

Etchant composition and etching method

MATSUI ATSUSHI2 citations57

FUJIKAWA KAZUHIRO

1 patent

US8557711B2Oct 15, 2013

Etching solution composition for metal films

FUJIKAWA KAZUHIRO1 citations46

TAGO TSUGUHIRO

1 patent

US8545716B2Oct 1, 2013

Etching liquid composition

TAGO TSUGUHIRO0 citations27