Inventor

MOUT BEAT MARCO

DE3 patents

⚠️ This page may combine multiple inventors who share the name “MOUT BEAT MARCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US11079338B2Aug 3, 2021

Method for detecting a structure of a lithography mask and device for carrying out the method

ZEISS CARL SMT GMBH2 citations71

US11892769B2Feb 6, 2024

Method for detecting an object structure and apparatus for carrying out the method

ZEISS CARL SMT GMBH2 citations70

ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH

1 patent

US12558727B2Feb 24, 2026

Method and apparatus for additive manufacture of a workpiece

ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH0 citations44