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Inventor

VATUS JEAN R

US10 patents
⚠️ This page may combine multiple inventors who share the name “VATUS JEAN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US7651948B2Jan 26, 2010

Pre-cleaning of substrates in epitaxy chambers

APPLIED MATERIALS INC18 citations83
US7964038B2Jun 21, 2011

Apparatus for improved azimuthal thermal uniformity of a substrate

APPLIED MATERIALS INC18 citations79
US6876442B2Apr 5, 2005

Method of calibrating and using a semiconductor processing system

APPLIED MATERIALS INC10 citations71

VATUS JEAN R

2 patents
US8512472B2Aug 20, 2013

Method and apparatus to enhance process gas temperature in a CVD reactor

VATUS JEAN R9 citations80
US9058988B2Jun 16, 2015

Methods for depositing layers having reduced interfacial contamination

VATUS JEAN R0 citations48

COLLINS RICHARD O

1 patent
US8398777B2Mar 19, 2013

System and method for pedestal adjustment

COLLINS RICHARD O45 citations95

PATALAY KAILASH KIRAN

1 patent
US8441640B2May 14, 2013

Non-contact substrate support position sensing system and corresponding adjustments

PATALAY KAILASH KIRAN19 citations91

SIVARAMAKRISHNAN VISWESWAREN

1 patent
US9255346B2Feb 9, 2016

Silicon wafers by epitaxial deposition

SIVARAMAKRISHNAN VISWESWAREN5 citations82

SVAGOS TECHNIK INC

1 patent
US11041253B2Jun 22, 2021

Silicon wafers by epitaxial deposition

SVAGOS TECHNIK INC0 citations60

Crystal Solar Incorporated

1 patent
US9982363B2May 29, 2018

Silicon wafers by epitaxial deposition

Crystal Solar Incorporated1 citations60