Inventor
TANG JINSONG
US9 patents
⚠️ This page may combine multiple inventors who share the name “TANG JINSONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7682940B2Mar 23, 2010
Use of Cl2 and/or HCl during silicon epitaxial film formation
APPLIED MATERIALS INC32 citations96
US7960256B2Jun 14, 2011
Use of CL2 and/or HCL during silicon epitaxial film formation
APPLIED MATERIALS INC8 citations84
US7732305B2Jun 8, 2010
Use of Cl2 and/or HCl during silicon epitaxial film formation
APPLIED MATERIALS INC10 citations84