Inventor
KUPPURAO SATHEESH
US38 patents
⚠️ This page may combine multiple inventors who share the name “KUPPURAO SATHEESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
28 patentsUS7955646B2Jun 7, 2011
Elimination of flow and pressure gradients in low utilization processes
APPLIED MATERIALS INC381 citations99
US7494545B2Feb 24, 2009
Epitaxial deposition process and apparatus
APPLIED MATERIALS INC246 citations99
US6037273AMar 14, 2000
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC139 citations97
US6410456B1Jun 25, 2002
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC25 citations92
US6159866ADec 12, 2000
Method for insitu vapor generation for forming an oxide on a substrate
APPLIED MATERIALS INC35 citations92
US7976634B2Jul 12, 2011
Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems
APPLIED MATERIALS INC18 citations89
US9845550B2Dec 19, 2017
Upper dome with injection assembly
APPLIED MATERIALS INC7 citations84
US9322097B2Apr 26, 2016
EPI base ring
APPLIED MATERIALS INC7 citations84
US7967911B2Jun 28, 2011
Apparatus and methods for chemical vapor deposition
APPLIED MATERIALS INC12 citations84
US7560352B2Jul 14, 2009
Selective deposition
APPLIED MATERIALS INC15 citations84
US7709391B2May 4, 2010
Methods for in-situ generation of reactive etch and growth specie in film formation processes
APPLIED MATERIALS INC8 citations83
US10202707B2Feb 12, 2019
Substrate processing system with lamphead having temperature management
APPLIED MATERIALS INC4 citations73
US10119192B2Nov 6, 2018
EPI base ring
APPLIED MATERIALS INC3 citations73
US9842753B2Dec 12, 2017
Absorbing lamphead face
APPLIED MATERIALS INC2 citations73
US9580835B2Feb 28, 2017
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC2 citations73
US7262116B2Aug 28, 2007
Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation
APPLIED MATERIALS INC9 citations73
US9768043B2Sep 19, 2017
Quartz upper and lower domes
APPLIED MATERIALS INC4 citations72
US6280790B1Aug 28, 2001
Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system
APPLIED MATERIALS INC14 citations70
US9832816B2Nov 28, 2017
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC2 citations69
US7770431B2Aug 10, 2010
Methods and apparatus for insitu analysis of gases in electronic device fabrication systems
APPLIED MATERIALS INC3 citations63
US10458040B2Oct 29, 2019
Upper dome with injection assembly
APPLIED MATERIALS INC1 citations62
US10077508B2Sep 18, 2018
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC1 citations62
US9230837B2Jan 5, 2016
Multizone control of lamps in a conical lamphead using pyrometers
APPLIED MATERIALS INC1 citations62
US7718225B2May 18, 2010
Method to control semiconductor film deposition characteristics
APPLIED MATERIALS INC3 citations61
US10312096B2Jun 4, 2019
Methods for titanium silicide formation using TiCl4 precursor and silicon-containing precursor
APPLIED MATERIALS INC0 citations52
US10224421B2Mar 5, 2019
Self-aligned process for sub-10nm fin formation
APPLIED MATERIALS INC0 citations52
US8020427B2Sep 20, 2011
Methods and apparatus for insitu analysis of gases in electronic device fabrication systems
APPLIED MATERIALS INC0 citations52
US10306708B2May 28, 2019
Absorbing reflector for semiconductor processing chamber
APPLIED MATERIALS INC0 citations48