Inventor

GANG TIAN

NL4 patents

⚠️ This page may combine multiple inventors who share the name “GANG TIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

2 patents

US11656555B2May 23, 2023

Lithographic apparatus and illumination uniformity correction system

ASML HOLDING NV3 citations64

US12339583B2Jun 24, 2025

Optimization using a non-uniform illumination intensity profile

ASML HOLDING NV0 citations58

ASML NETHERLANDS BV

1 patent

US10845706B2Nov 24, 2020

Mirror array

ASML NETHERLANDS BV2 citations61

ZEISS CARL SMT GMBH

1 patent

US11327403B2May 10, 2022

Illumination optical system for projection lithography

ZEISS CARL SMT GMBH0 citations56