Inventor
SANCHEZ ERROL
US19 patents
⚠️ This page may combine multiple inventors who share the name “SANCHEZ ERROL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS7132338B2Nov 7, 2006
Methods to fabricate MOSFET devices using selective deposition process
APPLIED MATERIALS INC149 citations98
US6559039B2May 6, 2003
Doped silicon deposition process in resistively heated single wafer chamber
APPLIED MATERIALS INC23 citations90
US6726955B1Apr 27, 2004
Method of controlling the crystal structure of polycrystalline silicon
APPLIED MATERIALS INC14 citations84
US7737007B2Jun 15, 2010
Methods to fabricate MOSFET devices using a selective deposition process
APPLIED MATERIALS INC12 citations83
US7732269B2Jun 8, 2010
Method of ultra-shallow junction formation using Si film alloyed with carbon
APPLIED MATERIALS INC10 citations83
US7709391B2May 4, 2010
Methods for in-situ generation of reactive etch and growth specie in film formation processes
APPLIED MATERIALS INC8 citations83
US7439142B2Oct 21, 2008
Methods to fabricate MOSFET devices using a selective deposition process
APPLIED MATERIALS INC10 citations83
US6991999B2Jan 31, 2006
Bi-layer silicon film and method of fabrication
APPLIED MATERIALS INC11 citations81
US7838431B2Nov 23, 2010
Method for surface treatment of semiconductor substrates
APPLIED MATERIALS INC7 citations73
US8999821B2Apr 7, 2015
Fin formation by epitaxial deposition
APPLIED MATERIALS INC2 citations61
US7718225B2May 18, 2010
Method to control semiconductor film deposition characteristics
APPLIED MATERIALS INC3 citations61