Inventor
RAMAMOORTHY ARUN
US8 patents
⚠️ This page may combine multiple inventors who share the name “RAMAMOORTHY ARUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
7 patentsUS6734445B2May 11, 2004
Mechanized retractable pellicles and methods of use
INTEL CORP21 citations90
US6646720B2Nov 11, 2003
Euv reticle carrier with removable pellicle
INTEL CORP59 citations89
US7423275B2Sep 9, 2008
Erosion mitigation for collector optics using electric and magnetic fields
INTEL CORP13 citations83
US7413586B2Aug 19, 2008
In-tool and out-of-tool protection of extreme ultraviolet (EUV) reticles
INTEL CORP10 citations83
US7446329B2Nov 4, 2008
Erosion resistance of EUV source electrodes
INTEL CORP5 citations61
US7102127B2Sep 5, 2006
Mechanized retractable pellicles and methods of use
INTEL CORP4 citations60
US6611327B2Aug 26, 2003
Detection of contaminants on low wavelength masks
INTEL CORP0 citations44