Inventor

WEI WEN-SHAN

TW3 patents

⚠️ This page may combine multiple inventors who share the name “WEI WEN-SHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

2 patents

US6545245B2Apr 8, 2003

Method for dry cleaning metal etching chamber

UNITED MICROELECTRONICS CORP3 citations57

US6281133B1Aug 28, 2001

Method for forming an inter-layer dielectric layer

UNITED MICROELECTRONICS CORP1 citations47

UNITED SILICON INC

1 patent

US6133091AOct 17, 2000

Method of fabricating a lower electrode of capacitor

UNITED SILICON INC1 citations50