Inventor
YANG WAN-CHENG
TW3 patents
Patents
3 patentsUS6953608B2Oct 11, 2005
Solution for FSG induced metal corrosion & metal peeling defects with extra bias liner and smooth RF bias ramp up
TAIWAN SEMICONDUCTOR MFG31 citations87
US6531415B1Mar 11, 2003
Silicon nitride furnace tube low temperature cycle purge for attenuated particle formation
TAIWAN SEMICONDUCTOR MFG12 citations70
US7091053B2Aug 15, 2006
In-line wafer surface mapping
TAIWAN SEMICONDUCTOR MFG0 citations46