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Inventor
ISHIKAWA KADUKO
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “ISHIKAWA KADUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ISHIKAWA KADUKO
2 patents
US9030798B2
May 12, 2015
Electrostatic chuck
ISHIKAWA KADUKO
0 citations
39
US8971010B2
Mar 3, 2015
Electrostatic chuck and method of manufacturing electrostatic chuck
ISHIKAWA KADUKO
0 citations
39
TOTO LTD
1 patent
US9093488B2
Jul 28, 2015
AC-driven electrostatic chuck
TOTO LTD
6 citations
67