Inventor

YONEZAWA JUNJI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “YONEZAWA JUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ISHIKAWA KADUKO

2 patents

US9030798B2May 12, 2015

Electrostatic chuck

ISHIKAWA KADUKO0 citations39

US8971010B2Mar 3, 2015

Electrostatic chuck and method of manufacturing electrostatic chuck

ISHIKAWA KADUKO0 citations39

TOTO LTD

1 patent

US9093488B2Jul 28, 2015

AC-driven electrostatic chuck

TOTO LTD6 citations67