Inventor

MEDVEDEV VIACHESLAV

RU4 patents

⚠️ This page may combine multiple inventors who share the name “MEDVEDEV VIACHESLAV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAKUNIN ANDREI MIKHAILOVICH

2 patents

US9007565B2Apr 14, 2015

Spectral purity filter

YAKUNIN ANDREI MIKHAILOVICH0 citations44

US9366967B2Jun 14, 2016

Radiation source

YAKUNIN ANDREI MIKHAILOVICH0 citations39

ASML NETHERLANDS BV

1 patent

US9411238B2Aug 9, 2016

Source-collector device, lithographic apparatus, and device manufacturing method

ASML NETHERLANDS BV4 citations72

ZEISS CARL SMT GMBH

1 patent

US10916356B2Feb 9, 2021

Reflective optical element

ZEISS CARL SMT GMBH0 citations49