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Inventor
ONIZAWA AKIHIRO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “ONIZAWA AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
2 patents
US7732792B2
Jun 8, 2010
Pattern measurement apparatus
HITACHI HIGH TECH CORP
23 citations
92
US10545018B2
Jan 28, 2020
Pattern measurement device, and computer program for measuring pattern
HITACHI HIGH TECH CORP
1 citations
59
MATSUOKA RYOICHI
1 patent
US8445871B2
May 21, 2013
Pattern measurement apparatus
MATSUOKA RYOICHI
6 citations
82
MIYAMOTO ATSUSHI
1 patent
US9057873B2
Jun 16, 2015
Global alignment using multiple alignment pattern candidates
MIYAMOTO ATSUSHI
2 citations
59