Inventor
CHANG KUEI-JEN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHANG KUEI-JEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6489227B1Dec 3, 2002
Method of etching a polysilicon layer during the stripping of the photoresist shape used as an etch mask to create an opening to an underlying fuse structure
TAIWAN SEMICONDUCTOR MFG17 citations80
US6320269B1Nov 20, 2001
Method for preparing a semiconductor wafer to receive a protective tape
TAIWAN SEMICONDUCTOR MFG6 citations60
US6723654B2Apr 20, 2004
Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer
TAIWAN SEMICONDUCTOR MFG4 citations55
US6908813B2Jun 21, 2005
Method of forming tiny silicon nitride spacer for flash EPROM by fully wet etching technology
TAIWAN SEMICONDUCTOR MFG1 citations47