Inventor

NORELL ANTHONY J

US5 patents

⚠️ This page may combine multiple inventors who share the name “NORELL ANTHONY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7854820B2Dec 21, 2010

Upper electrode backing member with particle reducing features

LAM RES CORP38 citations91

US9093483B2Jul 28, 2015

Showerhead electrode assembly with gas flow modification for extended electrode life

LAM RES CORP0 citations51

AUGUSTINO JASON

1 patent

US8702866B2Apr 22, 2014

Showerhead electrode assembly with gas flow modification for extended electrode life

AUGUSTINO JASON10 citations82

DE LA LLERA ANTHONY

1 patent

US8709202B2Apr 29, 2014

Upper electrode backing member with particle reducing features

DE LA LLERA ANTHONY2 citations61

KELLOGG MICHAEL C

1 patent

US8628268B2Jan 14, 2014

Cam lock electrode clamp

KELLOGG MICHAEL C2 citations61