Inventor

CHILESE FRANCIS

US3 patents

⚠️ This page may combine multiple inventors who share the name “CHILESE FRANCIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US8963110B2Feb 24, 2015

Continuous generation of extreme ultraviolet light

KLA TENCOR CORP12 citations79

US10953441B2Mar 23, 2021

System and method for cleaning optical surfaces of an extreme ultraviolet optical system

KLA TENCOR CORP1 citations60

KLA CORP

1 patent

US12044313B2Jul 23, 2024

Dual vacuum seal

KLA CORP0 citations50