Inventor

ROKUYAMA KOICHI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “ROKUYAMA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7176634B2Feb 13, 2007

Coaxial type impedance matching device and impedance detecting method for plasma generation

TOKYO ELECTRON LTD115 citations98

US7355379B2Apr 8, 2008

Coaxial type impedance matching device and impedance detecting method for plasma generation

TOKYO ELECTRON LTD16 citations92

JAPAN RADIO CO LTD

2 patents

US6819052B2Nov 16, 2004

Coaxial type impedance matching device and impedance detecting method for plasma generation

JAPAN RADIO CO LTD16 citations92

US6856211B2Feb 15, 2005

Coaxial type impedance matching device

JAPAN RADIO CO LTD8 citations73