Inventor
KOBAYASHI FUMIYA
KR15 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI FUMIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS10163653B2Dec 25, 2018
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD5 citations82
US9390935B2Jul 12, 2016
Etching method
TOKYO ELECTRON LTD5 citations73
US11355352B2Jun 7, 2022
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD2 citations71
US10707091B2Jul 7, 2020
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD2 citations71
US12062522B2Aug 13, 2024
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD0 citations60
US9716014B2Jul 25, 2017
Method of processing workpiece
TOKYO ELECTRON LTD0 citations51