Inventor
SASA TAKASHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “SASA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS9846363B2Dec 19, 2017
Processing liquid supplying apparatus and method of supplying processing liquid
TOKYO ELECTRON LTD7 citations83
US11342198B2May 24, 2022
Processing liquid supplying apparatus and processing liquid supplying method
TOKYO ELECTRON LTD3 citations72
US10074546B2Sep 11, 2018
Processing liquid supplying apparatus and processing liquid supplying method
TOKYO ELECTRON LTD2 citations72
US9731226B2Aug 15, 2017
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD3 citations72
US9732910B2Aug 15, 2017
Processing-liquid supply apparatus and processing-liquid supply method
TOKYO ELECTRON LTD3 citations72
US10734251B2Aug 4, 2020
Liquid processing apparatus, liquid processing method, and storage medium for liquid process
TOKYO ELECTRON LTD5 citations71
US10036379B2Jul 31, 2018
Processing liquid supplying apparatus, processing liquid supplying method and storage medium
TOKYO ELECTRON LTD4 citations70
US10518199B2Dec 31, 2019
Treatment solution supply apparatus
TOKYO ELECTRON LTD1 citations60
US10400760B2Sep 3, 2019
Liquid delivery method, liquid delivery system, and computer-readable storage medium
TOKYO ELECTRON LTD1 citations59
US10268116B2Apr 23, 2019
Processing liquid supplying apparatus and method of supplying processing liquid
TOKYO ELECTRON LTD0 citations51
US10022652B2Jul 17, 2018
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD1 citations51
US9878267B2Jan 30, 2018
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD1 citations51
US9778571B2Oct 3, 2017
Processing liquid supplying apparatus, processing liquid supplying method and storage medium
TOKYO ELECTRON LTD0 citations39
US10655619B2May 19, 2020
Pump, pump device, and liquid supply system
TOKYO ELECTRON LTD0 citations36
MAEDA MUNENORI
2 patentsSAMSUNG ELECTRONICS CO LTD
2 patentsUS11733616B2Aug 22, 2023
System for supplying photoresist and method for fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US12455513B2Oct 28, 2025
Chemical liquid circulation apparatus, chemical liquid dispensing apparatus, and chemical liquid supply system having the same
SAMSUNG ELECTRONICS CO LTD0 citations48