Inventor
PECEN JIRI
US11 patents
⚠️ This page may combine multiple inventors who share the name “PECEN JIRI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS6111634AAug 29, 2000
Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing
LAM RES CORP155 citations98
US6146248ANov 14, 2000
Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
LAM RES CORP114 citations97
US6254459B1Jul 3, 2001
Wafer polishing device with movable window
LAM RES CORP143 citations96
US6108091AAug 22, 2000
Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
LAM RES CORP86 citations96
US6068539AMay 30, 2000
Wafer polishing device with movable window
LAM RES CORP200 citations96
US6261155B1Jul 17, 2001
Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
LAM RES CORP42 citations95
US6621584B2Sep 16, 2003
Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
LAM RES CORP36 citations92
TENCOR INSTRUMENTS
4 patentsUS4766324AAug 23, 1988
Particle detection method including comparison between sequential scans
TENCOR INSTRUMENTS138 citations95
US4641967AFeb 10, 1987
Particle position correlator and correlation method for a surface scanner
TENCOR INSTRUMENTS115 citations95
US5083035AJan 21, 1992
Position location in surface scanning using interval timing between scan marks on test wafers
TENCOR INSTRUMENTS25 citations92
US4512659AApr 23, 1985
Apparatus for calibrating a surface scanner
TENCOR INSTRUMENTS25 citations81