Inventor
CHADDA SAKET
US24 patents
⚠️ This page may combine multiple inventors who share the name “CHADDA SAKET”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM IPEC CORP
8 patentsUS6736952B2May 18, 2004
Method and apparatus for electrochemical planarization of a workpiece
SPEEDFAM IPEC CORP155 citations98
US6464855B1Oct 15, 2002
Method and apparatus for electrochemical planarization of a workpiece
SPEEDFAM IPEC CORP74 citations95
US7033464B2Apr 25, 2006
Apparatus for electrochemically depositing a material onto a workpiece surface
SPEEDFAM IPEC CORP23 citations92
US6793565B1Sep 21, 2004
Orbiting indexable belt polishing station for chemical mechanical polishing
SPEEDFAM IPEC CORP23 citations92
US6572755B2Jun 3, 2003
Method and apparatus for electrochemically depositing a material onto a workpiece surface
SPEEDFAM IPEC CORP33 citations92
US6974525B2Dec 13, 2005
Method and apparatus for electrochemical planarization of a workpiece
SPEEDFAM IPEC CORP7 citations73
US7229343B2Jun 12, 2007
Orbiting indexable belt polishing station for chemical mechanical polishing
SPEEDFAM IPEC CORP0 citations52
US6849547B2Feb 1, 2005
Apparatus and process for polishing a workpiece
SPEEDFAM IPEC CORP1 citations52
LAM RES CORP
7 patentsUS6111634AAug 29, 2000
Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing
LAM RES CORP155 citations98
US6146248ANov 14, 2000
Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
LAM RES CORP114 citations97
US6108091AAug 22, 2000
Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
LAM RES CORP86 citations96
US6261155B1Jul 17, 2001
Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
LAM RES CORP42 citations95
US6328642B1Dec 11, 2001
Integrated pad and belt for chemical mechanical polishing
LAM RES CORP66 citations94
US6621584B2Sep 16, 2003
Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
LAM RES CORP36 citations92
US6656025B2Dec 2, 2003
Integrated pad and belt for chemical mechanical polishing
LAM RES CORP5 citations72