Inventor

LIM MARTIN

US57 patents

⚠️ This page may combine multiple inventors who share the name “LIM MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LIM MARTIN

INVENSENSE INC

Internal electrical contact for enclosed MEMS devices

Integrated MEMS devices with controlled pressure environments by means of enclosed volumes

Integrated MEMS devices with controlled pressure environments by means of enclosed volumes

Method and system of releasing a MEMS structure

MEMS acoustic sensor with integrated back cavity

Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

Acoustic ambient temperature and humidity sensing

Acoustic ambient temperature and humidity sensing

MEMS device and process for RF and low resistance applications

Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same

Integrated heater on MEMS cap for wafer scale packaged MEMS sensors

MEMS device including an electrical interconnect through a substrate

Cavity pressure modification using local heating with a laser

Method of increasing MEMS enclosure pressure using outgassing material

MEMS acoustic sensor with integrated back cavity

Gas sensing device with chemical and thermal conductivity sensing

Live fingerprint detection utilizing an integrated ultrasound and infrared sensor

CMOS-MEMS integrated device including multiple cavities at different controlled pressures and methods of manufacture

Capacitive sensing structure with embedded acoustic channels

CMOS-MEMS-CMOS platform

CMOS-MEMS integrated device including multiple cavities at different controlled pressures and methods of manufacture

Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same

Method of increasing MEMS enclosure pressure using outgassing material

Differential sensing acoustic sensor

Method for providing a MEMS device with a plurality of sealed enclosures having uneven standoff structures and MEMS device thereof

Method for MEMS structure with dual-level structural layer and acoustic port

Internal electrical contact for enclosed MEMS devices

Internal electrical contact for enclosed MEMS devices

Integrated package containing MEMS acoustic sensor and environmental sensor and methodology for fabricating same

Capacitive sensing structure with embedded acoustic channels

Gas sensing method with chemical and thermal conductivity sensing

MEMS device and process for RF and low resistance applications

MEMS device and process for RF and low resistance applications

CMOS-MEMS-CMOS platform

MEMS device with electrodes permeable to outgassing species

Systems and apparatus having top port integrated back cavity micro electro-mechanical system microphones and methods of fabrication of the same

MEMS device and process for RF and low resistance applications

Film induced interface roughening and method of producing the same

OPTICNET INC

Latching mechanism for MEMS actuator and method of fabrication

Bistable latching actuator for optical switching applications

Micromachined apparatus and technique to align two dimensional fiber array

XEROX CORP

Lithographically defined ejection units

Acoustic printheads with optical alignment

SITEK INC

Angular rate sensor made from a structural wafer of single crystal silicon

Monolithic silicon intra-ocular pressure sensor and method therefor

LO CHIUNG C

Micromachined magnetic field sensors

OPTIC NET INC

Fiber optic switch using MEMS

YARALIOGLU GOKSEN G

Integrated heater on MEMS cap for wafer scale packaged MEMS sensors

ROHDE & SCHWARZ

Method of setting a measurement instrument and system for setting a measurement instrument

DANEMAN MICHAEL

Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures