Inventor
JIMBO SATORU
JP3 patents
Patents
3 patentsUS12307643B2May 20, 2025
Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus
CANON KK0 citations57
US12339595B2Jun 24, 2025
Measurement apparatus, lithography apparatus, and article manufacturing method
CANON KK0 citations56
US12148181B2Nov 19, 2024
Measurement apparatus that measures position information of measurement target in predetermined direction
CANON KK0 citations48