Inventor
ENGDAHL ERIK H
US9 patents
⚠️ This page may combine multiple inventors who share the name “ENGDAHL ERIK H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS5762536AJun 9, 1998
Sensors for a linear polisher
LAM RES CORP150 citations98
US6146248ANov 14, 2000
Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
LAM RES CORP114 citations97
US6261155B1Jul 17, 2001
Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
LAM RES CORP42 citations95
US6336845B1Jan 8, 2002
Method and apparatus for polishing semiconductor wafers
LAM RES CORP45 citations94
US6517418B2Feb 11, 2003
Method of transporting a semiconductor wafer in a wafer polishing system
LAM RES CORP18 citations92
US6224461B1May 1, 2001
Method and apparatus for stabilizing the process temperature during chemical mechanical polishing
LAM RES CORP44 citations91
US6729945B2May 4, 2004
Apparatus for controlling leading edge and trailing edge polishing
LAM RES CORP11 citations70
US6716093B2Apr 6, 2004
Low friction gimbaled substrate holder for CMP apparatus
LAM RES CORP5 citations51