Inventor
STEGER ROBERT
US15 patents
⚠️ This page may combine multiple inventors who share the name “STEGER ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS7274004B2Sep 25, 2007
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support
LAM RES CORP170 citations99
US6847014B1Jan 25, 2005
Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support
LAM RES CORP704 citations99
US6444083B1Sep 3, 2002
Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof
LAM RES CORP130 citations97
US7869184B2Jan 11, 2011
Method of determining a target mesa configuration of an electrostatic chuck
LAM RES CORP19 citations92
US7939784B2May 10, 2011
Electrostatic chuck support assembly
LAM RES CORP8 citations84
US7501605B2Mar 10, 2009
Method of tuning thermal conductivity of electrostatic chuck support assembly
LAM RES CORP12 citations84
US6952255B2Oct 4, 2005
System and method for integrated multi-use optical alignment
LAM RES CORP18 citations83
US9824904B2Nov 21, 2017
Method and apparatus for controlling spatial temperature distribution
LAM RES CORP4 citations73
US7152011B2Dec 19, 2006
Smart component-based management techniques in a substrate processing system
LAM RES CORP9 citations73
US7254510B2Aug 7, 2007
Smart component-based management techniques in a substrate processing system
LAM RES CORP0 citations51
APPLIED MATERIALS INC
3 patentsUS5534108AJul 9, 1996
Method and apparatus for altering magnetic coil current to produce etch uniformity in a magnetic field-enhanced plasma reactor
APPLIED MATERIALS INC52 citations96
US5730803AMar 24, 1998
Apparatus and method for transferring heat from a hot electrostatic chuck to an underlying cold body
APPLIED MATERIALS INC102 citations93
US6858265B2Feb 22, 2005
Technique for improving chucking reproducibility
APPLIED MATERIALS INC13 citations84