Inventor
LIN KUO-YIN
TW33 patents
⚠️ This page may combine multiple inventors who share the name “LIN KUO-YIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
21 patentsUS9768303B2Sep 19, 2017
Method and structure for FinFET device
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US9236446B2Jan 12, 2016
Barc-assisted process for planar recessing or removing of variable-height layers
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US9592585B2Mar 14, 2017
System and method for CMP station cleanliness
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations83
US11529712B2Dec 20, 2022
CMP polishing head design for improving removal rate uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10160091B2Dec 25, 2018
CMP polishing head design for improving removal rate uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11312882B2Apr 26, 2022
CMP slurry solution for hardened fluid material
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11031391B2Jun 8, 2021
Method for manufacturing a FinFET device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11011385B2May 18, 2021
CMP-friendly coatings for planar recessing or removing of variable-height layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10461080B2Oct 29, 2019
Method for manufacturing a FinFET device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US9852899B2Dec 26, 2017
Wafer back-side polishing system and method for integrated circuit device manufacturing processes
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US9748109B2Aug 29, 2017
CMP-friendly coatings for planar recessing or removing of variable-height layers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US9559021B2Jan 31, 2017
Wafer back-side polishing system and method for integrated circuit device manufacturing processes
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US9287127B2Mar 15, 2016
Wafer back-side polishing system and method for integrated circuit device manufacturing processes
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US11865666B2Jan 9, 2024
CMP polishing head design for improving removal rate uniformity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10868180B2Dec 15, 2020
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10714615B2Jul 14, 2020
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10164102B2Dec 25, 2018
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9954105B2Apr 24, 2018
Method and structure for FinFET devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9478431B2Oct 25, 2016
BARC-assisted process for planar recessing or removing of variable-height layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10774241B2Sep 15, 2020
CMP slurry solution for hardened fluid material
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9508716B2Nov 29, 2016
Methods of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
TAIWAN SEMICONDUCTOR MFG
9 patentsUS8889497B2Nov 18, 2014
Semiconductor devices and methods of manufacture thereof
TAIWAN SEMICONDUCTOR MFG22 citations92
US9048087B2Jun 2, 2015
Methods for wet clean of oxide layers over epitaxial layers
TAIWAN SEMICONDUCTOR MFG8 citations83
US7199001B2Apr 3, 2007
Method of forming MIM capacitor electrodes
TAIWAN SEMICONDUCTOR MFG7 citations74
US7189957B2Mar 13, 2007
Methods to improve photonic performances of photo-sensitive integrated circuits
TAIWAN SEMICONDUCTOR MFG6 citations63
US7169713B2Jan 30, 2007
Atomic layer deposition (ALD) method with enhanced deposition rate
TAIWAN SEMICONDUCTOR MFG6 citations63
US9153657B2Oct 6, 2015
Semiconductor devices comprising a fin
TAIWAN SEMICONDUCTOR MFG2 citations62
US9064959B2Jun 23, 2015
Method and apparatus for forming a CMOS device
TAIWAN SEMICONDUCTOR MFG0 citations51
US8853083B2Oct 7, 2014
Chemical mechanical polish in the growth of semiconductor regions
TAIWAN SEMICONDUCTOR MFG0 citations51
US7786552B2Aug 31, 2010
Semiconductor device having hydrogen-containing layer
TAIWAN SEMICONDUCTOR MFG0 citations41