Inventor
VINTON DAVID J
GB4 patents
Patents
4 patentsUS4600686AJul 15, 1986
Method of forming a resist mask resistant to plasma etching
PHILIPS CORP32 citations90
US4504574AMar 12, 1985
Method of forming a resist mask resistant to plasma etching
PHILIPS CORP33 citations90
US4377627AMar 22, 1983
Microminiature solid state device manufacture with automatic alignment of sub-patterns
PHILIPS CORP16 citations70
US4125418ANov 14, 1978
Utilization of a substrate alignment marker in epitaxial deposition processes
PHILIPS CORP18 citations70