Inventor
KIRSTEN DANIEL
DE5 patents
Patents
5 patentsUS10068744B2Sep 4, 2018
Charged particle optical apparatus for through-the lens detection of particles
ZEISS CARL MICROSCOPY GMBH5 citations82
US11276547B2Mar 15, 2022
Charged particle optical apparatus for through-the-lens detection of particles
ZEISS CARL MICROSCOPY GMBH2 citations71
US10522321B2Dec 31, 2019
Charged particle optical apparatus for through-the-lens detection of particles
ZEISS CARL MICROSCOPY GMBH3 citations71
US9741528B2Aug 22, 2017
Charged particle optical apparatus having a selectively positionable differential pressure module
ZEISS CARL MICROSCOPY GMBH6 citations71
US10861670B2Dec 8, 2020
Charged particle optical apparatus for through-the-lens detection of particles
ZEISS CARL MICROSCOPY GMBH0 citations50