Inventor

DOUBINA NATALIA

US2 patents

⚠️ This page may combine multiple inventors who share the name “DOUBINA NATALIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

1 patent

US7799684B1Sep 21, 2010

Two step process for uniform across wafer deposition and void free filling on ruthenium coated wafers

NOVELLUS SYSTEMS INC22 citations90

LAM RES CORP

1 patent

US9865501B2Jan 9, 2018

Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer

LAM RES CORP6 citations71