Inventor

KO JAEOK

KR3 patents

Patents

3 patents

US12283479B2Apr 22, 2025

Substrate processing method

ASM IP HOLDING BV0 citations54

US12451347B2Oct 21, 2025

Semiconductor processing method

ASM IP HOLDING BV0 citations45

US11551925B2Jan 10, 2023

Method for manufacturing a semiconductor device

ASM IP HOLDING BV0 citations44