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Inventor
TACHINO YUUICHI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “TACHINO YUUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
1 patent
US6926800B2
Aug 9, 2005
Plasma etching method and apparatus
FUJITSU LTD
8 citations
69
FUJITSU SEMICONDUCTOR LTD
1 patent
US7906033B2
Mar 15, 2011
Plasma etching method and apparatus
FUJITSU SEMICONDUCTOR LTD
0 citations
47