Inventor

SIKDER ARUN K

US2 patents

Patents

2 patents

US7377170B2May 27, 2008

System and method for the identification of chemical mechanical planarization defects

UNIV SOUTH FLORIDA8 citations69

US7406396B2Jul 29, 2008

System and method for online end point detection for use in chemical mechanical planarization

UNIV SOUTH FLORIDA2 citations58