Inventor

BOEKHOLT FRANCISCUS JOHANNES MARIA

NL2 patents

⚠️ This page may combine multiple inventors who share the name “BOEKHOLT FRANCISCUS JOHANNES MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

COMPEN RENE THEODORUS PETRUS

1 patent

US9019476B2Apr 28, 2015

Lithographic apparatus and device manufacturing method

COMPEN RENE THEODORUS PETRUS4 citations65

ASML NETHERLANDS BV

1 patent

US7978308B2Jul 12, 2011

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations57