Inventor
YAMAHIRA YUTAKA
JP3 patents
Patents
3 patentsUS5498294AMar 12, 1996
Apparatus and method for washing substrates
TOKYO ELECTRON LTD68 citations94
US5035200AJul 30, 1991
Processing liquid supply unit
TOKYO ELECTRON LTD51 citations91
US6311091B1Oct 30, 2001
Substitute processing apparatus with power distribution control for reduced power consumption during apparatus start up
TOKYO ELECTRON LTD16 citations79